PECVD silicon nitride diaphragms for condenser microphones
P.R. Scheeper, J.A. Voorthuyzen, P. BergveldVolume:
4
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0925-4005(91)80180-r
File:
PDF, 684 KB
english, 1991