Structural and electrical characterization of PVD-deposited...

Sensors and Actuators B: Chemical 1995 Vol. 25; Iss. 1-3

Structural and electrical characterization of PVD-deposited SnO2 films for gas-sensor application

H.-J. Michel, H. Leiste, J. Halbritter
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Volume:
25
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0925-4005(95)85124-0
File:
PDF, 1.32 MB
english, 1995
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