Tailoring growth and local composition by oblique-incidence...

Materials Science and Engineering: R: Reports 1994 Vol. 11; Iss. 7

Tailoring growth and local composition by oblique-incidence deposition: a review and new experimental data

Herma van Kranenburg, Cock Lodder
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Volume:
11
Year:
1994
Language:
english
Pages:
60
DOI:
10.1016/0927-796x(94)90021-3
File:
PDF, 4.82 MB
english, 1994
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