A positive-type photoresist utilizing photoinitiated introduction of pendent amino groups
Kyoung-Hun Song, Shuji Tonogai, Masahiro Tsunooka, Makoto TanakaVolume:
49
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/1010-6030(89)87124-2
File:
PDF, 509 KB
english, 1989