ChemInform Abstract: Room Temperature Silicon Wafer Bonding...

ChemInform 1997 Vol. 28; Iss. 24

ChemInform Abstract: Room Temperature Silicon Wafer Bonding with Ultra-Thin Polymer Films.

G. KRAEUTER, A. SCHUMACHER, U. GOESELE, T. JAWOREK, G. WEGNER
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Volume:
28
Year:
1997
Pages:
1
DOI:
10.1002/chin.199724274
File:
PDF, 26 KB
1997
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