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Optical characterization of ns-SiN:H in the infrared by spectroscopic ellipsometry
Jordi Sancho-Parramon, Salvador Bosch, Adolf CanillasVolume:
253
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2006.05.072
File:
PDF, 348 KB
english, 2006