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Optical models for the ellipsometric characterization of carbon nitride layers prepared by inverse pulsed laser deposition
P. Petrik, T. Lohner, L. Égerházi, Zs. GeretovszkyVolume:
253
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2006.05.102
File:
PDF, 219 KB
english, 2006