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Dry etching of zinc-oxide and indium-zinc-oxide in IBr and BI3 plasma chemistries
W.T. Lim, L. Stafford, Ju-Il Song, Jae-Soung Park, Y.W. Heo, Joon-Hyung Lee, Jeong-Joo Kim, S.J. PeartonVolume:
253
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2006.07.094
File:
PDF, 857 KB
english, 2007