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An optical emission spectroscopy study of the plasma generated in the DC HF CVD nucleation of diamond
M.M. Larijani, F. Le Normand, O. CrégutVolume:
253
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.apsusc.2006.09.004
File:
PDF, 1.25 MB
english, 2007