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Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique
Erwu Niu, Li Li, Guohua Lv, Wenran Feng, Huan Chen, Songhua Fan, Size Yang, Xuanzong YangVolume:
253
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2006.11.042
File:
PDF, 586 KB
english, 2007