Synthesis and electrochemical characteristics of Ta–N thin films fabricated by cathodic arc deposition
Li Li, Erwu Niu, Guohua Lv, Xianhui Zhang, Huan Chen, Songhua Fan, Chizi Liu, Si-Ze YangVolume:
253
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2007.01.128
File:
PDF, 745 KB
english, 2007