Synthesis and electrochemical characteristics of Ta–N thin...

Synthesis and electrochemical characteristics of Ta–N thin films fabricated by cathodic arc deposition

Li Li, Erwu Niu, Guohua Lv, Xianhui Zhang, Huan Chen, Songhua Fan, Chizi Liu, Si-Ze Yang
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Volume:
253
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2007.01.128
File:
PDF, 745 KB
english, 2007
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