![](/img/cover-not-exists.png)
Raman spectroscopy of a-C:H:N films deposited using ECR-CVD with mixed gas
Fan-Xin Liu, Kai-Lun Yao, Zu-Li LiuVolume:
253
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2007.02.020
File:
PDF, 537 KB
english, 2007