The effect of hydrogen on copper nitride thin films...

Applied Surface Science 2008 Vol. 254; Iss. 16

The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering

Guangan Zhang, Pengxun Yan, Zhiguo Wu, Jun Wang, Jiangtao Chen
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Volume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.01.156
File:
PDF, 574 KB
english, 2008
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