Characterization of phosphorus-doped homoepitaxial...

Characterization of phosphorus-doped homoepitaxial (1 0 0) diamond films grown using high-power-density MWPCVD method with a conventional quartz-tube chamber

Takahiro Nakai, Osamu Maida, Toshimichi Ito
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Volume:
254
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.02.167
File:
PDF, 527 KB
english, 2008
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