Copper diffusion in TaN-based thin layers
J. Nazon, B. Fraisse, J. Sarradin, S.G. Fries, J.C. Tedenac, N. FrétyVolume:
254
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.03.015
File:
PDF, 650 KB
english, 2008