Annealing effects on the optical and structural properties of Al2O3/SiO2 films as UV antireflection coatings on 4H-SiC substrates
Feng Zhang, Weifeng Yang, Aisuo Pang, Zhengyun Wu, Hongji Qi, Jianke Yao, Zhengxiu Fan, Jianda ShaoVolume:
254
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.04.015
File:
PDF, 833 KB
english, 2008