Pre-doping effects on Ni fully silicided metal gate on SiO2...

Applied Surface Science 2008 Vol. 255; Iss. 5-part-P1

Pre-doping effects on Ni fully silicided metal gate on SiO2 dielectric

Bao-Min Wang, Guo-Ping Ru, Yu-Long Jiang, Xin-Ping Qu, Bing-Zong Li, Ran Liu
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Volume:
255
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.06.024
File:
PDF, 1.33 MB
english, 2008
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