Investigations of semiconductor devices using SIMS; diffusion, contamination, process control
Jae Cheol Lee, Jeongyeon Won, Youngsu Chung, Hyungik Lee, Eunha Lee, Donghun Kang, Changjung Kim, Jinhak Choi, Jeomsik KimVolume:
255
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.06.129
File:
PDF, 1.09 MB
english, 2008