Gas doping ratio effects on p-type hydrogenated...

Applied Surface Science 2008 Vol. 255; Iss. 5-part-P2

Gas doping ratio effects on p-type hydrogenated nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition

P.Q. Luo, Z.B. Zhou, K.Y. Chan, D.Y. Tang, R.Q. Cui, X.M. Dou
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Volume:
255
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.08.038
File:
PDF, 382 KB
english, 2008
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