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Annealing effects on the bonding structures, optical and mechanical properties for radio frequency reactive sputtered germanium carbide films
C.Q. Hu, J.Q. Zhu, W.T. Zheng, J.C. HanVolume:
255
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.apsusc.2008.08.115
File:
PDF, 542 KB
english, 2009