Sub-micron parallel laser direct-write

Sub-micron parallel laser direct-write

Christina M. Othon, Arnaldo Laracuente, H.D. Ladouceur, Bradley R. Ringeisen
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Volume:
255
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.apsusc.2008.09.058
File:
PDF, 853 KB
english, 2008
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