Electrical conductivity dependence of thin metallic films...

Applied Surface Science 2009 Vol. 255; Iss. 6

Electrical conductivity dependence of thin metallic films of Au and Pd as a top electrode in capacitor applications

S. Nazarpour, E. Langenberg, O. Jambois, C. Ferrater, M.V. García-Cuenca, M.C. Polo, M. Varela
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Volume:
255
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2008.10.015
File:
PDF, 1.29 MB
english, 2009
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