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Structural properties of Al2O3 dielectrics grown on TiN metal substrates by atomic layer deposition
Chun-I. Hsieh, Tung-Ming Pan, Jian-Chyi Lin, Yan-Bo Peng, Tsai-Yu Huang, Chang-Rong Wu, Steven ShihVolume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2008.10.048
File:
PDF, 925 KB
english, 2009