Effect of H2 dilution on a-CN:H films deposited by hot-wire chemical vapor deposition
Bibhu P. Swain, Bhabani S. Swain, Nong M. HwangVolume:
255
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.apsusc.2009.07.020
File:
PDF, 451 KB
english, 2009