Comparative study of NH4OH and HCl etching behaviours on...

Applied Surface Science 2010 Vol. 256; Iss. 7

Comparative study of NH4OH and HCl etching behaviours on AlGaN surfaces

Rakesh Sohal, Piotr Dudek, Oliver Hilt
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Volume:
256
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.apsusc.2009.09.075
File:
PDF, 944 KB
english, 2010
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