Fabrication of nanoimprinted curved feature for focusing...

Current Applied Physics 2006 Vol. 6; Iss. supp-S1

Fabrication of nanoimprinted curved feature for focusing grating coupler using hydrogen silsesquioxane mold

Hojun Ryu, Dongwoo Suh, Mun Cheol Paek
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Volume:
6
Year:
2006
Language:
english
Pages:
1
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2006.01.023
File:
PDF, 238 KB
english, 2006
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