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Optimised process for fabricating functional silicon nanowhisker arrays
A. Markwitz, M. Rudolphi, B. Barry, H. BaumannVolume:
8
Year:
2008
Language:
english
Pages:
5
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2007.10.023
File:
PDF, 420 KB
english, 2008