Properties of ITO films deposited by RF superimposed DC...

Current Applied Physics 2009 Vol. 9; Iss. 3-supp-S

Properties of ITO films deposited by RF superimposed DC magnetron sputtering

Se Il Kim, Sang Hyun Cho, Sung Ryong Choi, Han Ho Yoon, Pung Keun Song
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Volume:
9
Year:
2009
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2009.01.031
File:
PDF, 318 KB
english, 2009
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