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H2/Ar and vacuum annealing effect of ZnO thin films deposited by RF magnetron sputtering system
Jwayeon Kim, Myung-chun Kim, Jaekeun Yu, Kyeongsoon ParkVolume:
10
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2010.02.041
File:
PDF, 745 KB
english, 2010