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Recombination of oxygen atomic excited states produced by non-equilibrium RF plasma on different semiconductor materials: catalytic phenomena and modelling
C. Guyon, S. Cavadias, I. Mabille, M. Moscosa-Santillan, J. AmourouxVolume:
89
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.cattod.2003.11.022
File:
PDF, 485 KB
english, 2004