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Effects of experimental parameters on the physical properties of non-stoichiometric sputtered vanadium nitrides films
H. Gueddaoui, G. Schmerber, M. Abes, M. Guemmaz, J.C. ParlebasVolume:
113
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.cattod.2005.11.079
File:
PDF, 481 KB
english, 2006