Development of an original model for the synthesis of...

Development of an original model for the synthesis of silicon nanodots by Low Pressure Chemical Vapor Deposition

V. Cocheteau, P. Mur, T. Billon, E. Scheid, B. Caussat
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Volume:
140
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.cej.2008.02.027
File:
PDF, 667 KB
english, 2008
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