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Development of an original model for the synthesis of silicon nanodots by Low Pressure Chemical Vapor Deposition
V. Cocheteau, P. Mur, T. Billon, E. Scheid, B. CaussatVolume:
140
Year:
2008
Language:
english
Pages:
9
DOI:
10.1016/j.cej.2008.02.027
File:
PDF, 667 KB
english, 2008