Data-based and model-based blockage diagnosis for stacked microchemical processes
Manabu Kano, Toku Fujioka, Osamu Tonomura, Shinji Hasebe, Masaru NodaVolume:
62
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.ces.2006.11.011
File:
PDF, 316 KB
english, 2007