![](/img/cover-not-exists.png)
Multiscale modeling in chemical vapor deposition processes: Coupling reactor scale with feature scale computations
Nikolaos Cheimarios, George Kokkoris, Andreas G. BoudouvisVolume:
65
Year:
2010
Language:
english
Pages:
11
DOI:
10.1016/j.ces.2010.06.004
File:
PDF, 703 KB
english, 2010