Subroutines for some plasma surface interaction processes:...

Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation

Manoj Warrier, Ralf Schneider, Xavier Bonnin
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Volume:
160
Year:
2004
Language:
english
Pages:
23
DOI:
10.1016/j.cpc.2004.02.011
File:
PDF, 296 KB
english, 2004
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