Sparse field level set method for non-convex Hamiltonians...

Computer Physics Communications 2006 Vol. 174; Iss. 2

Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations

Branislav Radjenović, Jae Koo Lee, Marija Radmilović-Radjenović
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Volume:
174
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.cpc.2005.09.010
File:
PDF, 345 KB
english, 2006
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