Plasma etching and feature evolution of organic low-k...

Plasma etching and feature evolution of organic low-k material by using VicAddress

T. Makabe, T. Shimada, T. Yagisawa
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Volume:
177
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.cpc.2007.02.050
File:
PDF, 639 KB
english, 2007
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