Automatic target defect identification for TFT-LCD array...

Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble

Yi-Hung Liu, Szu-Hsien Lin, Yi-Ling Hsueh, Ming-Jiu Lee
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Volume:
36
Year:
2009
Language:
english
Pages:
21
DOI:
10.1016/j.eswa.2007.12.015
File:
PDF, 2.33 MB
english, 2009
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