An efficient approach to cross-fab route planning for wafer...

An efficient approach to cross-fab route planning for wafer manufacturing

Muh-Cherng Wu, Chang-Fu Shih, Chen-Fu Chen
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Volume:
36
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.eswa.2009.02.008
File:
PDF, 309 KB
english, 2009
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