Use of neural network to model X-ray photoelectron...

Expert Systems with Applications 2009 Vol. 36; Iss. 8

Use of neural network to model X-ray photoelectron spectroscopy data for diagnosis of plasma etch equipment

Byungwhan Kim, Jeong Kim, Seongjin Choi
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Volume:
36
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.eswa.2009.03.004
File:
PDF, 367 KB
english, 2009
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