Study on current density distribution of electron beam spots by wave optics theory
Xiaoli Guo, Tiantong Tang, Yongfeng Kang, Yan RenVolume:
120
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.ijleo.2007.08.004
File:
PDF, 201 KB
english, 2009