Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter
I-Tseng Tang, Han-Jan Chen, W.C Hwang, Y.C Wang, Mau-Phon Houng, Yeong-Her WangVolume:
262
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2003.10.081
File:
PDF, 625 KB
english, 2004