Electrochemical atomic layer deposition of copper nanofilms...

Journal of Crystal Growth 2010 Vol. 312; Iss. 8

Electrochemical atomic layer deposition of copper nanofilms on ruthenium

Daniel K. Gebregziabiher, Youn-Geun Kim, Chandru Thambidurai, Valentina Ivanova, Paul-Henri Haumesser, John L. Stickney
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Volume:
312
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2009.11.038
File:
PDF, 414 KB
english, 2010
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