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Numerical studies of flow patterns during Czochralski growth of square-shaped Si crystals
W. Miller, Ch. Frank-Rotsch, P. RudolphVolume:
318
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2010.10.098
File:
PDF, 808 KB
english, 2011