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Novel system for X-ray CTR scattering measurement on in-situ observation of OMVPE growth of nitride semiconductor heterostructures
Koji Ninoi, Guang Xu Ju, Hajime Kamiya, Shingo Fuchi, Masao Tabuchi, Yoshikazu TakedaVolume:
318
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2010.10.201
File:
PDF, 798 KB
english, 2011