Effects of the furnace pressure on oxygen and silicon oxide distributions during the growth of multicrystalline silicon ingots by the directional solidification process
Ying-Yang Teng, Jyh-Chen Chen, Chung-Wei Lu, Hsueh-I Chen, Chuck Hsu, Chi-Yung ChenVolume:
318
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2010.11.110
File:
PDF, 759 KB
english, 2011