Numerical simulation of oxygen transport during the CZ...

Journal of Crystal Growth 2011 Vol. 318; Iss. 1

Numerical simulation of oxygen transport during the CZ silicon crystal growth process

Jyh-Chen Chen, Ying-Yang Teng, Wan-Ting Wun, Chung-Wei Lu, Hsueh-I Chen, Chi-Yung Chen, Wen-Chieh Lan
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Volume:
318
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2010.11.145
File:
PDF, 907 KB
english, 2011
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