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Radio frequency magnetron sputtering of Au and low temperature plasma enhanced chemical vapor deposition of silicon nitride for ring ultramicroelectrodes fabrication
Mingzhi Zhu, Zhuangde Jiang, Weixuan Jing, Biao YangVolume:
596
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.jelechem.2006.07.030
File:
PDF, 345 KB
english, 2006