The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film
Sheng-Wen Chen, Chuan-Pu Liu, Shiu-Ko JangJian, Ying-Lang WangVolume:
69
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.jpcs.2007.07.071
File:
PDF, 417 KB
english, 2008