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Performances of interferometric optical transmission diagnostic for in situ and real-time control of magnetron sputtering deposition process
F. Perry, A. Billard, P. PigeatVolume:
41
Year:
2008
Language:
english
Pages:
10
DOI:
10.1016/j.measurement.2007.06.003
File:
PDF, 1.54 MB
english, 2008